JPH0187237U - - Google Patents
Info
- Publication number
- JPH0187237U JPH0187237U JP18196887U JP18196887U JPH0187237U JP H0187237 U JPH0187237 U JP H0187237U JP 18196887 U JP18196887 U JP 18196887U JP 18196887 U JP18196887 U JP 18196887U JP H0187237 U JPH0187237 U JP H0187237U
- Authority
- JP
- Japan
- Prior art keywords
- dust
- floating dust
- detection section
- sampling air
- laser beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000428 dust Substances 0.000 claims description 11
- 238000001514 detection method Methods 0.000 claims description 5
- 238000005070 sampling Methods 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims 2
- 239000000203 mixture Substances 0.000 claims 1
- 239000005416 organic matter Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
Landscapes
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18196887U JPH0187237U (en]) | 1987-12-01 | 1987-12-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18196887U JPH0187237U (en]) | 1987-12-01 | 1987-12-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0187237U true JPH0187237U (en]) | 1989-06-08 |
Family
ID=31473429
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18196887U Pending JPH0187237U (en]) | 1987-12-01 | 1987-12-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0187237U (en]) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5766342A (en) * | 1980-04-28 | 1982-04-22 | Agency Of Ind Science & Technol | Optical measuring method for suspension particles in medium |
| JPS61182238A (ja) * | 1985-02-07 | 1986-08-14 | Sharp Corp | レジスト等有機化合物残渣検査装置 |
-
1987
- 1987-12-01 JP JP18196887U patent/JPH0187237U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5766342A (en) * | 1980-04-28 | 1982-04-22 | Agency Of Ind Science & Technol | Optical measuring method for suspension particles in medium |
| JPS61182238A (ja) * | 1985-02-07 | 1986-08-14 | Sharp Corp | レジスト等有機化合物残渣検査装置 |